Waferpedia

Comparison ledger

0010-14300 Magnet AssyversusGSD 200 E 2

Applied Materials 0010-14300 Magnet Assy, Axcelis GSD 200 E 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyAxcelis GSD 200 E 2
Specifications
ConfigurationP4 Magnet Assy, IMP[1]—
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Voltage—208 V[2]
Frequency—50 Hz[2]
Phase—3 Phase[2]
Type—High Current ion implanter[3]
Energy—180 KeV[3]
Wafer Size—8 inch (200 mm)[3]
Power Requirements—208 V, 125 A, 50 Hz, 3 Phase[2]
Vintage (listed unit 158479)—2000[4]
Vintage (listed unit 158478)—2004[2]
Maximum Energy—180 keV[3]
Current—125 A[2]
Energy Rating—180KeV[3]
Amperage—125 A[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]asseta.comasseta.com
  4. [4]Equipment inventory listing