Comparison ledger
Applied Materials 0010-13622 RF Match for, Leybold Syrus Pro 710 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Syrus Pro 710 VacuumLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Leybold Syrus |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | Stainless steel chamber with flat door of aluminum[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Chamber inner diameter | — | 700 mm[2] |
| Pirani transmitter range | — | 1000 mbar to 10E-3 mbar[2] |
| Bayard Alpert transmitter range | — | 10E-3 mbar - 10E-9 mbar[2] |
| Line voltage | — | 3AC400V/230V/+/-10%[2] |
| Line frequency | — | 50 Hz (60 Hz optional)[2] |
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