Waferpedia

Comparison ledger

0010-03485 Magnet Assyversus7300

Applied Materials 0010-03485 Magnet Assy, Zygo 7300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
7300Zygo
OEMApplied MaterialsZygo
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyZygo 7300
Cited variants—
  • NewView 7200[1]
Specifications
ConfigurationWP AL 300mm PVD[2]—
OEMApplied Materials[2]—
Model0010-03485[2]7300[7]
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]—
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]—
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Scan Speed—≤135 µm/sec[6]
System Zoom—Auto; multi (3 pos)[6]
Max Scan Range—≤20 mm[6]
Objectives—From 1X to 100X[6]
Max Field of View—14 mm standard; 22 mm optional (with megapixel camera)[6]
Turret Options—Motorized or Manual (6 Position)[6]
Z Stage—Motorized (100 mm travel)[6]
X-Y Stages—Manual (100 mm travel) or Motorized (150 mm travel)[6]
Tip/Tilt Stage—Manual or Motorized[6]
Encoded Z, X-Y Stage—Yes (optional)[6]
Measurement Principle—Scanning white light interferometry (SWLI)[6]
Height Resolution—0.1 nm[6]
Make—Zygo[7]
Category—Laboratory Equipment[8]
Type—3D optical surface profiler / profilometer[1]
Measurement principle—Scanning white light interferometry[1]
Measurement method—Scanning white light interferometry (SWLI)[6]
Sources (8)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com
  6. [6]lambdaphoto.co.uklambdaphoto.co.uk
  7. [7]Equipment inventory listing
  8. [8]manualslib.commanualslib.com