Waferpedia

Comparison ledger

0010-03254 E Chuckversus2100CD

Applied Materials 0010-03254 E Chuck, Varian 2100CD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
2100CDVarian
OEMApplied MaterialsVarian
Category——
Wafer size——
Process node——
Introduced——
Production run—1987–2007
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Varian 2100CD
Specifications
Power Source—Klystron[1]
Electron Energies—Yes[1]
Max Dose Rate Electrons—1000 MU/min[1]
Default photon dose rate—600 MU/min[1]
Multi-Leaf Collimator (MLC) options—80 (Field size 40x40cm); 120 MLC (Field size 40x40cm, Central 20cm of field - 5mm leaf width, Outer 20cm of field - 10mm leaf width)[1]
Portal Imager (EPID) options—LC250, aS500, aS1000 (optional)[1]
Cone-Beam CT—Only with OBI[1]
VMAT—Only with OBI[1]
Stereotactic Radiosurgery—Optional Cones or mMLC[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]oncologysystems.comoncologysystems.com