Waferpedia

Comparison ledger

0010-03254 E ChuckversusFlexiFab

Applied Materials 0010-03254 E Chuck, Solitec FlexiFab, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
FlexiFabSolitec
OEMApplied MaterialsSolitec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Solitec FlexiFab
Specifications
Manufacturer—Solitec[1]
Model—FlexiFab[1]
Equipment type—Coater and Developer[2]
Wafer size version—150 mm[2]
Wafer size configuration—6 inches (currently set up)[3]
Wafer handling—Automated[3]
Module configuration—Coater module, developer module, hotplate module, Cybor control module and power supply[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]tarasemi.comtarasemi.com