Waferpedia

Comparison ledger

0010-03254 E ChuckversusQMB 500

Applied Materials 0010-03254 E Chuck, Edwards QMB 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
QMB 500Edwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
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Family—Edwards QMB 500
Cited variants—
Specifications
Manufacturer—Edwards[2]
Model—QMB 500[2]
Equipment type—Pump[2]
Description—Compact mechanical booster with high pumping speeds[1]
Maximum continuous inlet pressure—20 mbar for QMB250F and QMB500F Mechanical Booster Pumps[1]
Cooling—Air-cooled for QMB500F; enclosed, water-cooled motor[1]
Inlet—ISO100[3]
Exhaust—ISO63[3]
Motor—3 phase, 208-230/460V, 50/60Hz[3]
Oil—hydrocarbon[3]
Weight—172 lbs[3]
Sources (4)Every fact above is drawn from these public sources
  1. [1]ajvs.comajvs.com
  2. [2]Equipment inventory listing
  3. [3]provac.comprovac.com
  4. [4]provac.comprovac.com