Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards IGX 600 M, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | IGX 600 MEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards IGX 600 M |
| Cited variants | — | |
| Specifications | ||
| Inlet | — | ISO100[2] |
| Exhaust | — | KF25[2] |
| Pumping speed | — | 365 CFM[2] |
| Ultimate pressure | — | 5.25 x 10-4 Torr[2] |
| Weight | — | 485 lbs[2] |
| Manufacturer | — | Edwards[3] |
| Model | — | IGX 600 M[3] |
| Type of product | — | dry pump[2] |