Waferpedia

Comparison ledger

-407B-2-S-CE-S293 Robotversus36 Lapper

ABM -407B-2-S-CE-S293 Robot, Lapmaster 36 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
36 LapperLapmaster
OEMABMLapmaster
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyABM -407B-2-S-CE-S293 RobotLapmaster 36
Specifications
ModelABM-407B-2-S-CE-S293[1]—
DescriptionROBOT[1]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1]—
Configuration—3 rings[2]
Diameter—900 mm[2]
Plate diameter—36 in (914.4 mm)[3]
Type—Single sided[3]
Versions—Open face or pneumatic lift[3]
Ring count—3 or 4 rings[4]
Motor—5.3 hp / 4.0 kW[3]
Lap plate speed—58 rpm[3]
Electrical system—230 / 460 V, 60 Hz, 3 phase with operator controls at 110 V[3]
Voltage—380 / 480 V, 3 phase | 230 V, 3 phase | 50 / 60 Hz[4]
Controls—Adjustable[4]
Sources (5)Every fact above is drawn from these public sources
  1. [1]dealer listingsemistarcorp.com
  2. [2]inventory listing
  3. [3]lapmaster-wolters.comlapmaster-wolters.com
  4. [4]lapmaster-wolters.comlapmaster-wolters.com
  5. [5]lapmaster-wolters.co.uklapmaster-wolters.co.uk