Comparison ledger
ABM -407B-1-S-CES293 Robot, KLA OP 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | OP 2600KLA | |
|---|---|---|
| OEM | ABM | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1994 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | KLA OP 2600 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | OP 2600[2] |
| Description | ROBOT[1] | Thin film measurement[4] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| P/N | — | 5A-80-00-0007-10[2] |
| Configuration | — | Refurbished[2] |
| Make | — | KLA / Therma-wave[2] |
| Tool name | — | Thermawave OP2600[3] |
| Wafer size | — | 8 inch[3] |
| Vintage | — | 1994-12[3] |
| Tool condition | — | Refurbished[3] |
| Cassette loader stations | — | Two[3] |
| Optical source | — | 675 nm thermoelectrically cooled diode laser[3] |
| Spectrometry light source | — | 450 to 840 nm tungsten halogen lamp[3] |
| Measurement modes | — | Beam Profile Reflectometry (BPR), Beam Profile Ellipsometry (BPE), and spectrometry[3] |