Comparison ledger
ABM 3 HR Mask Aligner UV Exposure, Brooks 017-0146-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | ABM | Brooks |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM 3 HR Mask Aligner UV Exposure | Brooks 017-0146-01 Prealigner |
| Specifications | ||
| Configuration | Precision alignment stage[1] | — |
| Mask Holder | 4” x 4” with 3” diameter substrate holder[1] | — |
| Voltage | 120V, 50/60 Hz.[1] | — |
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