Waferpedia

Comparison ledger

304 SST Batch Wafer Processingversus1000FP

Wafab 304 SST Batch Wafer Processing, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMWafabYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyWafab 304 SST Batch Wafer ProcessingYES 1000FP
Specifications
Configuration96"[1]—
MakeWafab[1]—
Model304 SST[1]Glen/YES 1000FP[4]
Wafer size6 inch[3]—
System type—Plasma cleaning system[4]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[4]
Designed use—Designed to accept a range of shelf sizes[4]
Application focus—Changing needs of the flat panel industry[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]web.archive.orgweb.archive.org