Waferpedia

Comparison ledger

160 XPversus160 XP Ion

Varian 160 XP, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
160 XPVarian
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
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Lifecycle milestones——
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Generation——
FamilyVarian 160 XPVarian 160 XP Ion
Cited variants—
Specifications
Configuration (160 XP Ion variant)150mm High Current IMP[1]—
Configuration—150mm High Current IMP[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com