Comparison ledger
Varian 160 XP Ion, Varian E 220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XP IonVarian | E 220Varian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1995 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP Ion | Varian E 220 |
| Specifications | ||
| Configuration | 150mm High Current IMP[1] | 5 Wire[3] |
| OEM | Varian[2] | — |
| Model | 160 XP Ion[2] | E 220[3] |
| Category | Ion Implantation[1] | Ion Implantation[4] |
| Tool type | ion implanter[1] | — |
| Phase | — | 3 Phase[3] |
| Manufacturer | — | Varian[3] |
| System type | — | Ion implanter[4] |
| Electrical phase | — | 3-phase[3] |
| Wiring | — | 5-wire[3] |
| Voltage | — | 208 Volts[3] |
| E-clamp capability | — | E-clamp 6"[3] |
| Processing | — | Single blade processing[3] |
| Loading chambers | — | Two loading chambers[3] |
| Implants | — | Ar, AsH3, BF3 and PH3[3] |
| Vintage | — | 1995 Vintage[3] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →