Comparison ledger
Tousimis Automegasamdri 915B, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Automegasamdri 915BTousimis | 1000PYES |
|---|---|---|
| OEM | Tousimis | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Tousimis Automegasamdri 915B | YES 1000P |
| Specifications | ||
| Equipment type | Critical point dryer[1] | — |
| Process mode | Samples are dried at the CO2 supercritical point[1] | — |
| Starting medium | Ultra pure ethanol[1] | — |
| Chamber pressure before opening | 0 psi[1] | — |
| Operation modes mentioned | Auto Mode, HEAT, BLEED, VENT, COOL[1] | — |
| Type | Automated critical point drying system[2] | — |
| Substrate size | Up to 150 mm wafer[2] | — |
| Manufacturer location | Rockville, MD, United States[3] | — |
| Use | Drying freshly released structures with minimum sticking issues[1] | — |
| Drying medium | CO2 at the supercritical point[1] | — |
| Model | — | 1000P[4] |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Configuration | — | Parallel plate[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
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