Comparison ledger
Tokyo Electron Alpha 805, Tokyo Electron Alpha 805 D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 805Tokyo Electron | Alpha 805 DTokyo Electron |
|---|---|---|
| OEM | Tokyo Electron | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Alpha 805 | Tokyo Electron Alpha 805 |
| Specifications | ||
| Process | Dry Ox[1] | — |
| Configuration | — | PIQ[2] |
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