Comparison ledger
Tokyo Electron Alpha 8 SE D, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 8 SE DTokyo Electron | |
|---|---|---|
| OEM | Tokyo Electron | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Alpha | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Configuration | High Temp Oxide[1] | — |
| System Type | L Type[1] | — |
| Heater Model | VMU-40-007EX (1200 Deg C)[1] | — |
| Cassette I/O Type | Normal I/O Type[1] | — |
| AGV Compatibility | Unable[1] | — |
| System Main Controller | Waves[1] | — |
| Mechanical Controller | Waves[1] | — |
| Sequence Controller | Waves[1] | — |
| Gas Controller | Waves[1] | — |
| Gas Flow Chart Panel | Installed (Front, Rear)[1] | — |
| Optional Panel | Installed (Front, Rear)[1] | — |
| Signal Tower / Colors | Installed, 3 colors[1] | — |
| Furnace Temperature Controller | 560 A[1] | — |
| Furnace Overtemp Detector | Fenwal / MDMR-5FR[1] | — |
| Gas Detector | GD-K 7 D 4[1] | — |
| Detecting Gas | Hcl, N2O[1] | — |
| User Host Computer I/F | SECS[1] | — |
| Process Gas | N2, O2, H2, N2O[1] | — |
| Basic Style | Integrated Gas System (Fujikin)[1] | — |
| Process | Hi Temp Oxide[2] | — |
| OEM | Tel[1] | — |
| Model | Alpha 8 SE D[1] | — |
| Equipment type | Furnace[1] | — |
| Wafer size | 6 inch[1] | — |
| Vintage | 2006[1] | — |
| Asset Number | — | 142841[3] |
| Last Confirm Date | — | October 14, 2025[4] |
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