Comparison ledger
Tokyo Electron Alpha 303 i K, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 303 i KTokyo Electron | |
|---|---|---|
| OEM | Tokyo Electron | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Alpha 303 | Varian 0332 F 9453 302 Diffusion |
| Cited variants | — | |
| Specifications | ||
| Configuration | MTO[1] | — |
| Software Version | V 2.13 Rev.004[3] | — |
| CIM | SECS[4] | — |
| Process | MOL[4] | — |
| Factory Interface | FOUP[3] | — |
| Handler System | Loadport (2)[3] | — |
| Category | Thermal / Diffusion[3] | — |
| Wafer size | 12 inch[1] | — |
| Tool type | Furnace[3] | — |
| CIM SECS | Supported[3] | — |
| Configuration options | MTO, DCS-MTO[3] | — |
| Vintage (MTO) | 2002[1] | — |
| Vintage (DCS-MTO) | 2009[2] | — |
| Handler system | 2 Handler System Loadport (2)[3] | — |
| Asset Number | — | 142841[5] |
| Last Confirm Date | — | October 14, 2025[6] |
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