Comparison ledger
Thermo Fisher 1300 Series Safety, Tokyo Electron Clean Track Act 8, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | Clean Track Act 8Tokyo Electron |
|---|---|---|
| OEM | Thermo Fisher | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | Interface Unit (IRA) for Canon FPA-3000 i5 stepper including one multi-buffer unit and Wafer edge exposure (WEE) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1997– |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | 1999 Vintage · 2001 Vintage · 2002 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | Tokyo Electron Clean Track |
| Cited variants | — | |
| Specifications | ||
| Configuration | Class II[4] | Single Block[3] |
| Cabinet type | Class II, Type A2 biological safety cabinet[5] | — |
| Airflow compensation | SmartFlow airflow compensation system[5] | — |
| Motors | Dual DC motors[5] | — |
| Front window design | SmartClean front window design[5] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[5] | — |
| UV light | Programmable UV light[5] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[5] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[5] | — |
| Front opening choices | 8-inch or 10-inch front opening[5] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[6] | — |
| Certification | NSF/ANSI 49, UL, CE[6] | — |
| Service valves | Up to 6 total, 3 on each side wall[6] | — |
| Water Flow | — | Left to Right[3] |
| Wafer size | — | Interface Unit (IRA) for Canon FPA-3000 i5 stepper including one multi-buffer unit and Wafer edge exposure (WEE)[3] |
| Software Version | — | 1.18.003[7] |
| Wafer sizes | — | 6 inch, 8 inch, 100 mm, 150 mm[2] |
| Number of cassette ports | — | 4 (2 for 100 mm, 2 for 150 mm)[8] |
| Spinning units | — | BCT (bottom coater), COT (coater), DEV (developer)[8] |
| Thermal plates | — | LHP, HHP, HCP, ADH, PHP, TRS, TCP[8] |
| Software | — | TEL GEM, Cascade wafer flow, system log down[3] |
| CIM interface | — | SECS[7] |
| Handler system | — | CRA, PRA[7] |
| Factory interface | — | SMIF[7] |
| Interface for stepper | — | Interface Unit (IRA) for Canon FPA-3000 i5 including multi-buffer and WEE[3] |
| OEM | — | Tokyo Electron[3] |
| Model | — | Clean Track Act 8[3] |
| Category hint | — | Wet Processing / Clean[3] |
| Water flow direction | — | Left to right[3] |
| Interface unit | — | Interface Unit (IRA) for Canon FPA-3000 i5 stepper including one multi-buffer unit and Wafer edge exposure (WEE)[3] |
| Temperature & humidity control | — | Temperature & Humidity control unit for Coater[3] |
| Software package | — | TEL GEM on-line software; Cascade wafer flow software; System log down software[3] |
| CIM | — | SECS[7] |
| Block configuration | — | Dual block - 2C / 2D[2] |
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