Comparison ledger
Tegal 1512e, Tokyo Electron TE 8500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | TE 8500Tokyo Electron |
|---|---|---|
| OEM | Tegal | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Tokyo Electron TE 8500 |
| Cited variants | — | |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[2] | — |
| Stated configuration | With modules assembly for CI-4222[2] | — |
| Wafer size | — | 6 inch[1] |
| Process type | — | Etch (Dry)[4] |
| Chambers (PESC Dry) | — | 1[1] |
| Application (PESC Dry) | — | Oxide etch with endpoint capability[1] |
| Vintage | — | 1994[4] |
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