Comparison ledger
Sumitomo SEN NV GSD HE Ion, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEN NV GSD HE IonSumitomo | 160 XPVarian |
|---|---|---|
| OEM | Sumitomo | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Sumitomo SEN | Varian 160 XP |
| Cited variants | — |
|
| Specifications | ||
| Voltage | 480 V[2] | — |
| Phase | 3 Phase[2] | — |
| Frequency | 60 Hz[2] | — |
| Power | 82 kVA[2] | — |
| Full Load Current | 99 A[2] | — |
| Input Breaker | 150 A[2] | — |
| Largest Load | 99 A[2] | — |
| Max Interrupt Capacity | 14 kA[2] | — |
| Configuration | 200 Volt[3] | — |
| Make | Sumitomo / SEN[2] | — |
| Model | NV GSD HE[2] | — |
| Wafer Sizes | 6 inch[3] | — |
| Vintage | 2000 Vintage[3] | — |
| Configuration (160 XP Ion variant) | — | 150mm High Current IMP[1] |
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