Waferpedia

Comparison ledger

100R16versusAbrapol 10

Strasbaugh 100R16, Struers Abrapol 10, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
Abrapol 10Struers
OEMStrasbaughStruers
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyStrasbaugh 100R16Struers Abrapol 10
Specifications
type1 spindle grinder/polisher[1]—
drive systemDC drive system with 2 motors[1]—
spindle RPM1-180 RPM[1]—
eccentric RPM1-90 RPM[1]—
controlsdigital timer; air down switch; spindle and eccentric speed dials; air regulators[1]—
capacity16 inches[1]—
spindle size1-8 TPI[1]—
overall dimensions28 inches x 36 inches x 48 inches[1]—
weight500 lbs[1]—
originmade in the USA[1]—
Configuration—Automatic Dosage of Lubricants and Abrasives[2]
Power—1.5kW[2]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com
  2. [2]inventory listing