Waferpedia

Comparison ledger

11600 SRDversus300 ML Evergreen Series III Wafer Mask

Semitool 11600 SRD, SSEC 300 ML Evergreen Series III Wafer Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMSemitoolSSEC
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDSSEC 300 ML Evergreen Series III Wafer Mask
Specifications
ConfigurationCeramic[1]—
ManufacturerSemitool[1]—
Model11600 SRD[1]300 ML Evergreen Series III[2]
Equipment typeSpin Rinse Dryer[1]—
Make—SSEC[2]
Equipment Type—Wafer Mask Scrubber[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing