Waferpedia

Comparison ledger

108Tversus6 DS SP

PR Hoffman 108T, Strasbaugh 6 DS SP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
108TPR Hoffman
6 DS SPStrasbaugh
OEMPR HoffmanStrasbaugh
CategoryCMPCMP
Wafer sizeup to 12 in wafersSingle Wafer SiC Substrate
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPR Hoffman 108TStrasbaugh 6 DS SP
Specifications
carrier type listing108T 9B - S/F / Lapmaster LSP-9 / etc.[1]—
machine classfor double-sided planetary lapping & polishing machines[1]—
wafer sizes stated on insert-carrier page3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[1]—
maximum carrier diameter stated on insert-carrier pageup to 33 in diameter[1]—
maximum carrier diameter stated on lapping-carrier pageup to 48 in diameter[2]—
Configuration—Multi Process[3]
Voltage—208 V, 3 Phase, 60 Hz[4]
Full Load—60 A[4]
Motor—36 A[4]
Interrupting Capacity—10,000 A[4]
Wafer size—Single Wafer SiC Substrate[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing
  4. [4]inventory listing