Comparison ledger
Plasma-Therm Versaline VCX 600 ICP, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Versaline VCX 600 ICPPlasma-Therm | 1512eTegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm Versaline | Tegal 1512e |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Configuration | 3 Wire[1] | — |
| Source Generator | ENI MKS GMW25[1] | — |
| Wafer Size | 6 inch[1] | — |
| Electrical Input | 1 Phase, 3 Wire, 50/60 Hz, 208/230 Vac, 15 A[1] | — |
| Included Equipment | Chillers, Transformer, Pumps[1] | — |
| Electrical Configuration | 1 Phase - 3 Wire - 50/60 Hz - 208/230 Vac - 15 A[1] | — |
| Vintage | 2013, 2014[1] | — |
| Included Components | Chillers, Transformer, Pumps[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
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