Comparison ledger
Plasma-Therm 210RL-A, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 210RL-APlasma-Therm | 1512eTegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm 210RL-A | Tegal 1512e |
| Specifications | ||
| Equipment name in document | RIE-PlasmaTherm-210RL-A[1] | — |
| Category | DRY ETCH[1] | — |
| Tool type | RIE[1] | Industrial RIE plasma etcher system[2] |
| Equipment listing name | RIE-PlasmaTherm-210RL-A[1] | — |
| Stated configuration | — | With modules assembly for CI-4222[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →