Comparison ledger
Pfeiffer TPU 510 Turbomolecular Vacuum, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TPU 510 Turbomolecular VacuumPfeiffer | |
|---|---|---|
| OEM | Pfeiffer | Tri |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Pfeiffer TPU | Tri -Mist 850 Electronic Air Filter |
| Cited variants |
| — |
| Specifications | ||
| Oil | F3 100ml[2] | — |
| S(N2) | 500 I/s[2] | — |
| Mass | 30 kg[2] | — |
| Model | TPU 510[2] | — |
| Make | Pfeiffer[2] | — |
| Type | Turbomolecular Vacuum Pump[2] | — |
| Intake flange | DN 160 CF-F[3] | — |
| Fore-vacuum flange | DN 40 KF[3] | — |
| Volume flow rate N2 | 500 l/s[3] | — |
| Volume flow rate He | 570 l/s[3] | — |
| Volume flow rate H2 | 500 l/s[3] | — |
| Speed | 60,000 rpm[3] | — |
| Weight | 30 kg[3] | — |
| Oil filling | 2x10 cm^3[3] | — |
| Cooling water requirement | 15 l/h[3] | — |
| Cooling water temperature | 5-25 C[3] | — |
| Permissible ambient temperature for air cooling | 0-35 C[3] | — |
| Power input of heater | 250 Watt[3] | — |
| Maximum compression ratio N2 | 8x10^8[3] | — |
| Maximum compression ratio He | 1.5x10^4[3] | — |
| Maximum compression ratio H2 | 1x10^3[3] | — |
| Ultimate pressure | 10^-11 mbar[3] | — |
| Recommended backing pump | 12 Acc electronic drive unit TCP 300 (TCP 300), TCP 310 (TCP 310), TCP 380[3] | — |
| Ultimate operating pressure | <1x10^-10 mbar[3] | — |
| Pressure | <1x10^-9 mbar[3] | — |
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