Comparison ledger
Oxford Instruments plasmapro-ngp80-rie, Tegal 980, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | plasmapro-ngp80-rieOxford Instruments | 980Tegal |
|---|---|---|
| OEM | Oxford Instruments | Tegal |
| Category | Etch | Etch |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments plasmapro-ngp80-rie | Tegal 980 |
| Cited variants | — | |
| Specifications | ||
| Equipment name | Oxford NGP80 RIE[2] | — |
| Tag/alias | Oxford-PlasmaPro-NGP80-RIE[2] | — |
| Process type | plasma etch[2] | Plasma etch[1] |
| Etch chemistry | CHF3/Ar plasma[3] | — |
| Process temperature | 20°C[3] | — |
| Typical application | Etching of SiO2 hard mask[3] | — |
| plasma chemistry | CHF3/Ar plasma[3] | — |
| use | Etching SiO2 hard mask[3] | — |
| Series name | — | 980 ACS Series[1] |
| Wafer size | — | 200mm[1] |
| System type | — | Single wafer cassette-to-cassette etch system[1] |
| Throughput | — | Faster throughput[1] |
| Calibration | — | Faster system calibration[1] |
| User interface | — | Touchscreen graphical user interface[1] |
| Data handling | — | Integrated data logging[1] |
| Factory automation | — | Factory automation support[1] |
| Tool format | — | Single wafer cassette-to-cassette etch system[1] |
| System calibration | — | Faster system calibration[1] |
| Automation | — | Factory automation support[1] |
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