Waferpedia

Comparison ledger

806 MBA Maskversus1000 Family

OAI 806 MBA Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMOAIUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOAI 806 MBA MaskUltratech 1000 Family
Specifications
Wafer size4 inch[1]—
Included chuck sizes3 inch, 4 inch, 6 inch BSA chucks; 4 inch, 5 inch, 7 inch mask holders[3]—
Tool type—Photolithography step-and-repeat 1X stepper[4]
Optical design—Wynne Dyson[4]
Magnification—1X[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]tarasemi.comtarasemi.com
  4. [4]en.wikipedia.orgen.wikipedia.org