Comparison ledger
Laurell EDC-HL-23, Laurell WS-650-23, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EDC-HL-23Laurell | WS-650-23Laurell |
|---|---|---|
| OEM | Laurell | Laurell |
| Category | Spin coater | Spin coater |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | 650-series | — |
| Family | Laurell EDC-HL-23 | Laurell WS-650-23 |
| Cited variants |
| |
| Specifications | ||
| Process controller | 650-series process controller[1] | — |
| Wafer capacity | Up to 150 mm wafers[1] | Up to ø 150 mm wafers[2] |
| Substrate capacity | Up to 5 in x 5 in (127 mm x 127 mm) substrates[1] | 5" × 5" (127 mm × 127 mm) substrates[2] |
| Maximum rotation capability | 12,000 RPM with vacuum hold-down[1] | — |
| Recommended operating speed | 3,000 RPM with non-vacuum chucks[1] | — |
| Power | 95 to 240 VAC, 47/63 Hz, ~300 Watts[1] | 95 to 240VAC, 47/63HZ, ~300 Watts[2] |
| Nitrogen/CDA seal purge pressure | 60–70 PSIG (4–5 bar)[1] | — |
| Vacuum recommendation | 25–28 inches Hg with 4.5 SCFM at 0 inches Hg[1] | — |
| Model | — | WS-650-23 B Spin Coater[2] |
| Mounting | — | Station Mounted[2] |
| Maximum rotational speed | — | 12,000 RPM (based on a ø 100 mm silicon wafer)[2] |
| Required N2 process/seal purge | — | 60–70 PSIG (4–5 bar) of Nitrogen/CDA[2] |
| Vacuum | — | 25–28 inches Hg; suggested flow volume 4.5 SCFM (0.127 cubic meters/minute) at 0 inches Hg[2] |
| Processes supported | — | Coating, Etching, Developing, Rinsing-Drying and Cleaning[2] |
| Maximum substrate size | — | 150 mm wafers, 5" × 5" (127 mm × 127 mm) substrates[2] |
| Vacuum requirement | — | 25–28 inches Hg (~635–711 mm Hg) with a flow volume of 4.5 SCFM (0.127 m³/min) at 0 inches Hg[2] |
| Seal/process purge gas | — | N₂ at 60–70 PSIG (4–5 bar)[2] |
| Gas consumption (standard motor) | — | 3 cubic feet per hour (0.085 m³/hour)[2] |
| Gas consumption (high-performance motor) | — | 20 cubic feet per hour (0.566 m³/hour)[2] |
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