Comparison ledger
Lapmaster 120 Continuous, Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 ContinuousLapmaster | |
|---|---|---|
| OEM | Lapmaster | Yaskawa |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lapmaster 120 Continuous | Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot |
| Specifications | ||
| Configuration | — | With XU-CM6180 Controller, Compatible with Ebara FREX 300 CMP[1] |
| Model | — | XU RSM 53 E 0[1] |
| Equipment type | — | Atmospheric Wafer Robot[1] |
| Category | — | CMP[2] |
| Wafer size | — | 12 inch[1] |
| Controller | — | XU-CM6180 Controller[2] |
| Compatibility | — | Compatible with Ebara FREX 300 CMP[1] |