Comparison ledger
Lam Research Rainbow 4520 Plasma RIE, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rainbow 4520 Plasma RIELam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Rainbow 4520 | Tegal 1512e |
| Specifications | ||
| Configuration | ESC with perimeter pins[1] | — |
| Without | pumps, chillers[1] | — |
| Manufacturer | Lam[2] | — |
| Model | Rainbow 4520[2] | — |
| Tool Type | Plasma RIE (Reactive Ion Etcher)[2] | — |
| Wafer Size | 8 inch[1] | — |
| Chuck Configuration | ESC with perimeter pins[1] | — |
| Load Locks | 2 (entrance and exit)[1] | — |
| Included Equipment | Without pumps, chillers[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[4] |
| Stated configuration | — | With modules assembly for CI-4222[4] |
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