Waferpedia

Comparison ledger

IPEC Avanti 472versus108T

Lam Research IPEC Avanti 472, PR Hoffman 108T, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IPEC Avanti 472Lam Research
108TPR Hoffman
OEMLam ResearchPR Hoffman
CategoryCMPCMP
Wafer sizeSingle waferup to 12 in wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECPR Hoffman 108T
Specifications
ConfigurationFully automated[1]—
Wafer sizeSingle wafer[1]—
carrier type listing—108T 9B - S/F / Lapmaster LSP-9 / etc.[2]
machine class—for double-sided planetary lapping & polishing machines[2]
wafer sizes stated on insert-carrier page—3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[2]
maximum carrier diameter stated on insert-carrier page—up to 33 in diameter[2]
maximum carrier diameter stated on lapping-carrier page—up to 48 in diameter[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org