Comparison ledger
Lam Research Gasonics PEP 3510 Plus, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics PEP 3510 PlusLam Research | 003163-000 SRDSemitool |
|---|---|---|
| OEM | Lam Research | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Gasonics PEP 3510 | Semitool 003163-000 SRD |
| Cited variants |
| — |
| Specifications | ||
| Power | 2 KW MW Generator[2] | — |
| Wafer Size | 8 inch[2] | — |
| MW Generator Power | 2 kW[3] | — |
| Make | — | Semitool[4] |
| Model | — | 003163-000[4] |
| Equipment type | — | Spin Rinse Dryer (SRD)[4] |
| Asset # | — | 139375[4] |
| Last Confirm Date | — | September 03, 2025[4] |
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