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Gasonics Aura 2000versusGasonics Aura 3010

Lam Research Gasonics Aura 2000, Lam Research Gasonics Aura 3010, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Gasonics Aura 2000Lam Research
Gasonics Aura 3010Lam Research
OEMLam ResearchLam Research
Category—Resist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research Gasonics AuraLam Research Gasonics Aura
Specifications
Phase3 Phase[1]—
Frequency50 Hz[1]—
Voltage208V[1]—
Configuration—Parts machine[2]
Equipment type—Asher[4]
Wafer size—6 inch[4]
Condition—Parts machine[2]
Make—Lam / Novellus / Gasonics[2]
Model—Aura 3010[2]
Type—Asher[2]
Wafer Sizes—6 inch[4]
Product description—Parts machine[2]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing