Comparison ledger
Lam Research Concept Two Speed S (A), Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Concept Two Speed S (A)Lam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2010 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Concept Two | Tegal 1512e |
| Specifications | ||
| Configuration | Chamber Only[1] | — |
| Voltage | 208 VAC[1] | — |
| Phase | 3 Phase[1] | — |
| Full Load | 21 A[1] | — |
| Main Breaker Rating | 25 A[1] | — |
| Largest Load | 8 A[1] | — |
| Interrupt Current | 10 KA[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →