Comparison ledger
Lam Research 2300 Exelan Flex 45 Dielectric, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2300 Exelan Flex 45 DielectricLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research 2300 | Tegal 1512e |
| Specifications | ||
| Configuration | With 12 gas lines[1] | — |
| Gas lines | 12[1] | — |
| Gases | C4F8, CF4, O2, Ar, CO, CO2, O2, CHF3, HBr, N2, SF6, H2[1] | — |
| Chamber | Single chamber with homemade manual load lock[1] | — |
| Plasma technology | High-density plasma[2] | — |
| Tool type | — | Industrial RIE plasma etcher system[3] |
| Stated configuration | — | With modules assembly for CI-4222[3] |
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