Comparison ledger
KLA INS 3000 Macro Defect, Test Research Inc (TRI) TR 7700 QM SII AOI, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Inc (TRI) TR 7700 QM SII AOITest Research | |
|---|---|---|
| OEM | KLA | Test Research |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA INS 3000 | Test Research Inc |
| Specifications | ||
| Loading Configuration | SMIF[2] | — |
| Configuration | No HDD[2] | Single Phase[1] |
| Number of Cassette Stations | 1[2] | — |
| Leica INS Series | INS-3000[2] | — |
| Microscope Objective Sizes | NA[2] | — |
| Make | KLA / Leica[2] | — |
| Model | INS 3000[2] | — |
| Wafer size | 8 inch[2] | — |
| Series | INS-3000[2] | — |
| Cassette stations | 1[2] | — |
| DIC | No[2] | — |
| ADC | No[2] | — |
| OCR | No[2] | — |
| Input | — | 200-240V[1] |
| Power | — | 3.0 kVA[1] |
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