Comparison ledger
KLA .498 PSL Wafer, Thermo Fisher Scientific FEI T 20 TEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI T 20 TEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Thermo Fisher Scientific FEI T 20 TEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | LaB6 filament has about 100 work hours[2] |
| NIST traceability | Yes[1] | — |
| Filament type | — | LaB6[2] |
| Filament life | — | about 100 work hours[2] |
| Camera | — | Fluorescent optical camera for iCor[2] |
| Software | — | iCor software integrated in UI[2] |
| Detector installed | — | Orius[2] |
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