Comparison ledger
KLA .496 PSL Wafer, Veeco NT 3300, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NT 3300Veeco | |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Veeco NT 3300 |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[3] | 200 mm stage[5] |
| Wafer size | 8 inch[3] | — |
| Traceability | NIST Traceable[3] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[3] | — |
| Category | Metrology & Inspection[4] | — |
| Objectives | — | 10x, 50x[5] |
| Stage Size | — | 200 mm[5] |
| Turret Barrels | — | Full complement of A, 0.5x, 1x, 2x[5] |
| Type | — | Optical Profiler[1] |
| Make | — | Veeco / Wyko[5] |
| Model | — | NT 3300[5] |
| Equipment type | — | Profilometer[5] |
| Stage | — | 200 mm stage[5] |
| Turret barrels | — | A, 0.5x, 1X, 2X barrels[5] |
| Documentation | — | Manuals & software available[5] |
| Barrels | — | A, 0.5x, 1X, 2X[5] |
| Measurement Type | — | Optical Profiler[2] |
| Stage size | — | 200 mm stage[5] |
| Included documentation / software | — | Manuals & software available[5] |
| Additional barrels | — | A, 0.5x, 1X, 2X[5] |
| Measurement use | — | Optical profiler used for measuring arithmetic average surface roughness[7] |
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