Comparison ledger
KLA .496 PSL Wafer, Leica S9, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S9Leica | |
|---|---|---|
| OEM | KLA | Leica |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Leica S9 |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[2] | — |
| Wafer size | 8 inch[2] | — |
| Traceability | NIST Traceable[2] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[2] | — |
| Category | Metrology & Inspection[3] | — |
| Optical type | — | Greenough stereomicroscope[4] |
| Zoom ratio | — | 9:1[4] |
| Magnification | — | 6.1x-55x, 10x[4] |
| Field of view | — | up to 37.6 mm[4] |
| Magnification Range | — | 6.1x-55x[4] |
| Optical Design | — | Greenough[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →