Waferpedia

Comparison ledger

2830 Waferversus.498 PSL Wafer

KLA 2830 Wafer, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2830 WaferKLA .498 PSL Wafer
Specifications
ManufacturerKLA[1]—
Model2830[1]—
DescriptionWafer Inspection System[2]—
CategoryMetrology & Inspection[1]—
Version300 mm[3]—
Configuration—NIST Traceable[4]
NIST traceability—Yes[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]inventory listing