Comparison ledger
KLA 1007, Tokyo Electron Precio XL Production Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Precio XL Production WaferTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron Precio XL Production Wafer |
| Specifications | ||
| Manufacturer | KLA[1] | Tokyo Electron (TEL)[5] |
| Model | 1007[1] | Precio XL[4] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 12 inch[4] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | Production Wafer Prober[4] |
| Accuracy | — | 1.8 µm[3] |
| Z Accuracy | — | 5 µm[3] |
| Probing Force | — | 200 kg, 300 kg[3] |
| Stage Types | — | Linear Motor Type[3] |
| Automatic Wafer Size | — | 200 mm, 300 mm[3] |
| Wafer Sizes | — | 12 inch[4] |
| Version | — | 300mm[5] |
| Category | — | Production Wafer Prober[4] |
| Wafer Size | — | 300 mm (12 inch)[4] |
| Stage Type | — | Linear Motor[3] |
| Automatic | — | Yes[3] |
| OEM | — | Tokyo Electron[4] |
| General parameters | — | Accuracy 1.8 µm; Probing Force 200 kg, 300 kg; Stage Types Linear Motor; Type Automatic; Wafer Size 200 mm, 300 mm; Z Accuracy 5 µm[3] |
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