Waferpedia

Comparison ledger

1007versusWL-210

KLA 1007, Signatone WL-210, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
WL-210Signatone
OEMKLASignatone
CategoryTest & ProbeTest & Probe
Wafer size—up to 8-inch wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Signatone WL-210
Cited variants—
Specifications
ManufacturerKLA[2]—
Model1007[2]—
DescriptionWafer Prober[2]—
Wafer size150 mm[2]—
Convertible to 8 inch wafer sizeYes[2]—
Vintage01.06.1995[2]—
MakeKLA[3]—
Equipment typeProber[3]—
Base—Massive 2" one-piece machined aircraft aluminum base for stability[1]
Platen—Large heavy-duty nickel steel platen with 4 point planar lift[1]
Positioning stage—Fast, accurate and repeatable compound X-Y stage for sub-micron positioning[1]
Wafer/substrate compatibility—Accepts shards through 8" wafers, substrates, PCB's, and ultra-thin wafers[1]
Platen control—Independent platen height (locking) and contact / separate control[1]
Chuck and stage assembly—Non-ferrous chuck and stage assembly reduces magnetic interference and crosstalk[1]
Micropositioner support—Supports bolt-down, vacuum, and magnetic base micropositioners[1]
Chuck biasing—Banana / BNC / Triax chuck biasing[1]
Probe card holder—Quick-Change probe card holder option with independent theta adjust[1]
Microscope—Tilt-back microscope provides unobstructed fixturing access[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]Equipment inventory listing