Waferpedia

Comparison ledger

1007versusWL-1160

KLA 1007, Signatone WL-1160, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
WL-1160Signatone
OEMKLASignatone
CategoryTest & ProbeTest & Probe
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Signatone WL-1160
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Product type—RF / Microwave Probe Station[3]
Application focus—high-frequency, high-power, and millimeter wave applications[3]
Operating characteristic—non-resonant operation is critical[3]
Chuck sizes—150mm and 200mm chucks[3]
Calibration chuck—Independent calibration chuck located adjacent to the main chuck[3]
Calibration chuck material—Non-resonant polymer[3]
Microscope stage—2" x 2" microscope stage[3]
Microscope compatibility—Supports most StereoZoom and high-powered microscopes[3]
Platform sharing—Uses the same stable platform as the S-1160 multipurpose probe station[3]
X-Y motion control—150mm & 200mm manual X-Y motion control[3]
Microscope stage control—50mm X 50mm microscope stage control[3]
Height control—Separate contact / separate and platen height control[3]
Z motion—Up to 30mm Z motion control of platen[3]
Micropositioner capacity—Holds up to four S-96MW microwave micropositioners[3]
Standard manifolds—Vacuum and DC manifolds standard[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org