Comparison ledger
KLA 1007, Plasma-Therm VLR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | VLRPlasma-Therm |
|---|---|---|
| OEM | KLA | Plasma-Therm |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Plasma-Therm VLR |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | VLR[3] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | Plasmatherm[3] |
| Equipment type | Prober[2] | — |
| Configuration | — | With PECVD Module System & disconnected box[3] |
| Asset description | — | Plasmatherm VLR Handler - With PECVD Module System & disconnected box[3] |
| Related process-control reference | — | Unaxis VLR Dep / Unaxis VLR Etch[4] |
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