Comparison ledger
KLA 1.112 PSL Wafer, Zeiss Sigma 300 VP FE-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Sigma 300 VP FE-SEMZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zeiss Sigma |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| 1/N/PE | — | 230 Vac[3] |
| 2/PE | — | 208 Vac[3] |
| Power Frequency | — | 50/60 Hz[3] |
| Voltage (1/N/PE) | — | 230 Vac[3] |
| Voltage (2/PE) | — | 208 Vac[3] |
| Current | — | 16 A[3] |
| Short-Circuit Current Rating (SCCR) | — | 3.5 kA[3] |
| Included Detector | — | Bruker XFlash 6 I 30 Detector[3] |
| Vintage | — | 2022[3] |
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