Comparison ledger
KLA 1.112 PSL Wafer, Thermo Fisher Scientific FEI Expida 1285 FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Expida 1285 FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Thermo Fisher Scientific FEI Expida 1285 FIB-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | NG/Sirion Sfeg Column[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Manufacturer | — | Thermo Fisher Scientific / FEI[3] |
| Model | — | Expida 1285[3] |
| Tool type | — | Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)[3] |
| Wafer size | — | 12 inch[3] |
| Vacuum system | — | Oil Free vacuum system[4] |
| Optics column | — | NG/Sirion Sfeg Column[3] |
| Ion column | — | Sidewinder Ion Column[3] |
| Detectors | — | CDEM Detectors; ETD/TLD Detectors[3] |
| Stage | — | 5 axis 300mm stage[3] |
| Probe | — | Capacitance Probe[3] |
| Cleaner | — | Plasma Cleaner[3] |
| Electron Column | — | NG/Sirion Sfeg Column[3] |
| Capacitance Probe | — | Capacitance Probe[3] |
| Plasma Cleaner | — | Plasma Cleaner[3] |
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