Comparison ledger
KLA 1.112 PSL Wafer, Onto Innovation NSX 330, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 330Onto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Supports non-standard wafer types (Mems, Taiko, Thin) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Onto Innovation NSX 330 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Single Phase, GND[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Voltage Range | — | 208-240 VAC[3] |
| Rate Full Load Current | — | 12.75 Amps[3] |
| Rating of Largest Motor or Load | — | 5 Amps[3] |
| Wafer size | — | Supports non-standard wafer types (Mems, Taiko, Thin)[4] |
| Full load current | — | 12.75 Amps[5] |
| Maximum pneumatic working pressure | — | 110 PSI[5] |
| Category | — | Metrology & Inspection[4] |
| Phase | — | Single Phase[3] |
| Frequency | — | 50/60 Hz[3] |
| Largest motor or load rating | — | 5 Amps[3] |
| Camera configurations | — | Supports up to 6 camera configurations[4] |
| Imaging platform | — | 2D based image recognition platform with programmable lighting[4] |
| Stage | — | Programmable motorized stage[4] |
| Functions | — | Provides defect analysis and classification[4] |
| Resolution | — | 10μm to 0.5μm[3] |
| Review station | — | Supports navigation, display, annotation, classification review[3] |
| Defect review platform | — | Full-scale defect review platform for quick classification[3] |
| Special wafer handling | — | Supports large warpage (>12mm) and ultra-thin wafers (<50μm)[3] |
| HDD | — | HDD not included[3] |
| Pneumatic working pressure | — | 110 PSI[4] |
| Optics | — | Supports up to 6 camera configurations[4] |
| Software | — | NSX software supports storage and retrieval of metrology results[4] |
| Client software | — | Provides T defect review client[3] |
| Wafer handling | — | With lens, robot, controller[4] |
| Wafer types | — | Supports non-standard wafer types (Mems, Taiko, Thin)[4] |
| Inspection type | — | Inspection system[4] |
| Resolution options | — | 10μm to 0.5μm[4] |
| Power | — | 208-240 VAC[3] |
| Included items | — | With lens, robot, controller[3] |
| Review functions | — | Navigation, display, annotation, classification review[4] |
| Off-line review | — | Built-in review station supports off-line review[4] |
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