Comparison ledger
KLA 1.112 PSL Wafer, Nikon Optiphot 66, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Optiphot 66Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Nikon Optiphot 66 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Make | — | Nikon[3] |
| Model | — | Optiphot 66[3] |
| Category | — | Metrology & Inspection[4] |
| Head | — | Binocular or Trinocular 360 degree rotatable[5] |
| Eyepieces | — | 10x/20mm[5] |
| Reflected Light | — | Brightfield / Darkfield Reflected Light Module[5] |
| Nosepiece | — | Quadruple[5] |
| Objectives | — | Brightfield / Darkfield 5x, 10x, 20x, 50x Objectives[5] |
| Stage | — | Large XY Stage[5] |
| Focusing | — | Coaxial coarse & fine adjustment[5] |
| Light Source | — | Halogen[5] |
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