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1.112 PSL WaferversusSLF 17

KLA 1.112 PSL Wafer, KLA SLF 17, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1.112 PSL WaferKLA
SLF 17KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferKLA SLF
Specifications
ConfigurationNIST Traceable[1]No HDD[3]
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
Phase—3 Phase[3]
Vintage year—2006[3]
1.112 PSL Wafer entrySLF 17 entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing